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step coverage

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Category: Physical Chemistry

Using a heavy inert diffusion additive for superconformal atomic layer deposition

, Authors: Arun Haridas Choolakkal, Pamburayi Mpofu, Pentti Niiranen, Jens Birch, Henrik Pedersen

Version 1 posted 13 December 2024

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Category: Physical Chemistry

Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition

, Authors: Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen

Version 3 posted 05 September 2024

351

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ISSN 2573-2293 (Online) ChemRxiv Archive

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