Category:
Materials Chemistry
,
Working Paper
, Title:
Control of Cu morphology on Ru-passivated and Ru-doped TaN Surfaces – promoting growth of 2D conducting copper for CMOS interconnects
, Authors:
Cara-Lena Nies, Suresh Kondati Natarajan, Michael Nolan
Version 1 posted 23 August 2021
163
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