Search

Content Types

Working Paper

(1)

Published Date

Over 3 years

(1)

Keywords

dielectric material

Authors

1 results in Keywords: dielectric material

Materials Science

Plasma CVD of B-C-N Thin Films Using Triethylboron in Argon-Nitrogen Plasma

Laurent Souqui, Justinas Palisaitis, Hans Högberg, Henrik Pedersen

Version 1 posted 07 February 2020

458

Downloads