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substrate temperature

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1 results in Keywords: substrate temperature

Transformation of TiN to TiNO films via In-situ Temperature-dependent Oxygen Diffusion Process and their Electrochemical Behavior

Sheilah Cherono, Ikenna Chris-Okoro, Mengxin Liu, R. Soyoung Kim, Swapnil Nalawade, Wisdom Akande, Diana Maria Mihai, Johannes Mahl, Christopher Hale, Junko Yano, Shyam Aravamudhan, Ethan Crumlin, Valentin Craciun, Dhananjay Kumar

Version 1 posted 05 November 2024

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