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Tommy Larsson

3 results in Authors: Tommy Larsson

Materials Chemistry

Atomic Layer Deposition of AlxTi1-xN via Co-evaporation of Metal Precursors

Pamburayi Mpofu, Pentti Niiranen, Oscar Alm, Jonas Lauridsen, Tommy Larsson, Henrik Pedersen

Version 2 posted 27 January 2025

169

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Materials Chemistry

Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry

Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen

Version 1 posted 09 May 2024

365

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Physical Chemistry

A Mass Spectrometrical Surface Chemistry Study of Aluminum Nitride ALD from Tris-Dimethylamido Aluminum and Ammonia

Pamburayi Mpofu, Houyem Hafdi, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen

Version 1 posted 12 September 2024

140

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