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5 results in Authors: Pentti Niiranen

Physical Chemistry

Using a heavy inert diffusion additive for superconformal atomic layer deposition

Arun Haridas Choolakkal, Pamburayi Mpofu, Pentti Niiranen, Jens Birch, Henrik Pedersen

Version 1 posted 13 December 2024

80

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Physical Chemistry

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Pentti Niiranen, Hama Nadhom, Michal Zanaska, Robert Boyd, Mauricio Sortica, Daniel Primetzhofer, Daniel Lundin, Henrik Pedersen

Version 1 posted 25 August 2022

203

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Materials Chemistry

Plasma Decomposition of Ferrocene

Pentti Niiranen, Felicia Andersson, Daniel Lundin, Lars Ojamäe, Henrik Pedersen

Version 2 posted 29 November 2024

163

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Materials Chemistry

Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry

Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen

Version 1 posted 09 May 2024

319

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Physical Chemistry

Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition

Arun Haridas Choolakkal, Pentti Niiranen, Samira Dorri, Jens Birch, Henrik Pedersen

Version 3 posted 05 September 2024

351

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