Category:
Theoretical and Computational Chemistry
,
Working Paper
, Title:
Accurately computed dimerization fraction of ALD precursors and their impact on surface reactivity in area-selective atomic layer deposition
, Authors:
Patrick Maue, Émilie Chantraine, Fabian Pieck, Ralf Tonner-Zech
Version 1 posted 22 August 2024
226
Downloads