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Oscar Alm

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Physical Chemistry

A Mass Spectrometrical Surface Chemistry Study of Aluminum Nitride ALD from Tris-Dimethylamido Aluminum and Ammonia

Pamburayi Mpofu, Houyem Hafdi, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen

Version 1 posted 12 September 2024

107

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Materials Chemistry

Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry

Pamburayi Mpofu, Houyem Hafdi, Pentti Niiranen, Jonas Lauridsen, Oscar Alm, Tommy Larsson, Henrik Pedersen

Version 1 posted 09 May 2024

249

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