Category:
Inorganic Chemistry
,
Working Paper
, Title:
Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition
, Authors:
Polla Rouf, Nathan J O'Brien, Sydney C. Buttera, Ivan Martinovic, Babak Bakhit, Erik Martinsson, Justinas Palisaitis, Chih-Wei Hsu, Henrik Pedersen
Version 2 posted 21 May 2020
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