Category:
Physical Chemistry
,
Working Paper
, Title:
Surface chemistry in Atomic Layer Deposition of Gallium Nitride from Triethylgallium and Ammonia studied by mass spectroscopy
, Authors:
Houyem Hafdi, Pamburayi Mpofu, Alex Moberg Byam, Henrik Pedersen
Version 1 posted 25 November 2024
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