Abstract
We propose a process for decomposing and removing vacuum-compatible heat-resistant epoxy resins adhered to vacuum components by alkali fusion. We demonstrated the reworking of Al2O3 substrates with printed electrode patterns from the worn-out qPlus sensors using KOH-NaOH eutectic melt under atmospheric pressure. The substrate was reworked with a high yield of 94 % for a heating temperature of 510 ℃ and a duration of 5 min. The proposed method is an efficient removal technique for vacuum-compatible heat-resistant epoxy resins that can be performed at the laboratory level without special reagents or equipment. It enables reworking a wide range of vacuum components sufficiently resistant to the alkali melt.